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SIMP - Wafer Inspection The Solarius integrated metrology platform for semiconductor production

A SECS/GEM integrated wafer metrology tool for autonomous semiconductor manufacturing

watch product video

The SIMP is the all-new Solarius high-end process platform for the inspection of elements fabricated in semiconductor processes such as ICs, micro lenses or MEMS. The platform allows handling of all wafer sizes and types, including thin and Taiko wafers. The completely redeveloped SEMI compliant Win10 software platform allows a simple and intuitive operation in a contemporary look and feel.

The SIMP allows the integration of all optical sensor technologies available in the Solarius product portfolio as well as the combination of several sensors. The SIMP is available in modular concepts for 200/300 millimeter wafers as well as for up to 200 millimeter wafers to ensure optimal use of manufacturing space.

Both versions of the platform come with the new Win10 SEMI compliant user interface, which makes it easy to intuitively teach new products and provide error-proofing. In addition, an FDA-compliant audit trail is available as an option meeting international requirements and standards in the medical sector.


Available Sensor Technolgiesconfocal point, line & area sensors
interferometric point & area sensors
triangulation point & line sensors
focus variation and fusion technologies
Standards applicableSEMI, GAMP, FDA (optional)
SECS/GEM featuresE4, E5, E30, E37, E39, E40, E87,
E90, E94, E116, E84 AMHS
Hardware featuressingle / dual arm robots, ionizers
class 1 FFU modules, AGV adapters
edge grip, needle, Bernoulli end effectors
air/N2 burst modules for warpage wafer
Media SupplyCDA, Vacuum, N2 (optional)
220V 16A 50Hz, single phase
Lateral Working Range400 mm x 400 mm
Vertical Working Range400 µm to 10 mm
Lateral Resoultion0.042 µm up
Vertical Resolution0.1 nm up
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Park Teck Wah, Metrology Process Specialist
„A complex tool made easy to use. Great job!" Park Teck Wah, Metrology Process Specialist

Typical Applications

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Wafer Products

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Material Handling

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Consumer Electronic

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Ball Grid Arrays

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Automotive Industry

Are you interested?

To learn more about our products and solutions, please contact us or simply fill in your details below so a specialist can get in contact with you on short notice.

GERMANY

Mr. Andreas Schupp
Steinerne Furt 78

86167 Augsburg
Germany

  • +49 821 999 773 90
  • sales_de@jpkummer.eu
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Solarius GmbH — Registered office: Erpftinger Straße 36 — 86899 Landsberg am Lech — Germany
Managing Director: Dipl. Ing. Gianluca Elmo — Registration and court number: München, HRB 231612

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