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+49 151 422 045 30
  • Desktop 3D Inspection Systems
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SEMI BGA Fast 3D surface measurement

A HIGH SPEED measurement tool for SEMICONDUCTOR device applications

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The Solarius BGA Metrology System measures and characterizes the parameters of singulated semiconductor devices. This fast 3D optical measurement tool is ideal for quality assurance and process control and is built to common semiconductor industry standards.

  • Easy to automate
  • Ultra fast non-contact measurement
  • Perfect for online inspection
  • Customized recipes and algorithms
  • Customized data analysis
  • JEDEC or wafer capable
  • SEMI S2/S8 compliant

The BGA platform is a self-contained application specific metrology unit. It includes a fast non-contact confocal chromatic line sensor with a 3D measurement rate of several hundred thousand points per second at nanometric scale resolution. The BGA also includes a nanoprecision XY stage with a measuring range up to 400 mm x 400 mm as well as a vibration isolated platform. Proprietary analysis algorithms are available to provide customized data analysis.

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Typical Applications

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Wafer Products

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Ball Grid Arrays

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Consumer Electronic

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Automotive Industry

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Andy Miles

Business Development
Solarius USA

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To learn more about our products and solutions, please contact us or simply fill in your details below so a specialist can get in contact with you on short notice.

Branch Office Europe

Erpftinger Strasse 36
86899 Landsberg Am Lech
Deutschland

  • +49 151 422 045 30
  • sales@solarius.marposs.com
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Solarius Development Corp.
2360 Qume Drive
San Jose, CA 95131
U.S.A

Europe Operations

Solarius GmbH
Nünningstraße 13
45141 Essen
Germany

Asia Operations

Solarius Trading (Shanghai) Ltd.
Unit C102, Block
Li Fung Plaza
2000 Yishan Road
201103 Shanghai
Peoples Republic of China

Solarius GmbH — Registered office: Erpftinger Straße 36 — 86899 Landsberg am Lech — Germany
Managing Director: Dipl. Ing. Gianluca Elmo — Registration and court number: München, HRB 231612

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Region: Europe
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