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AOP PCI Probe Card High-end 3D surface metrology

Accuracy and precision down to the nanometer for most demanding measuring tasks

Wafer Probing is the last QC operation at the front end of line (FEoL) and the probe card quality and state has a big impact on the wafer test results. Faulty pins (beams), bent probe heads and objects within the probe card clearance can negatively affect the wafer test or even bring damage to an already tested wafer.

In order to easily measure the state of a probe card and to finally mechanically release a probe card for wafer test, SOLARIUS has developed a probe card inspection tool. The AOP-PCI (probe card inspection) is a multi-function, non-contact, non-destructive inspection tool for a holistic probe card checkup.  Combining high-precision stages with state of the art sensor and vision systems, Solarius can acquire accurate and reliable data of the probe card tips, head geometry and PCB surfaces even for full sized square direct dock probe cards. In addition, a dedicated measurement algorithm can seamlessly run routine for both data acquisition and analysis.

Probe Tip / Pin InspectionVertical / MEMS / Pogo / Cantilever
Height
Diameter
Misalignment
Presence
Debris / Particle
Coplanarity / Tilt
Damage
PCB InspectionGeometry
Missing Components
Debris / Particle
Defects
ResolutionLateral: 50 nm up
Vertical: 1 nm up
Change over< 2 mins between Probe Card Interfaces
Standards applicableSEMI, GAMP, FDA (optional)
SECS/GEM featuresE4, E5, E30, E37, E39, E40, E87,
E90, E94, E116, E84 AMHS

The modular AOP PCI platform can be equipped with lab capabilities for easy probe card rework or can be designed for OHT and/or AGV probe card handling to achieve fully automated production control inside wafer test fabs.

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Typical Applications

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Ball Grid Arrays

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Critical Dimension

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Wafer Products

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Fingerprint Sensor

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Consumer Electronic

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Typical Parameters

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Your Contact
240620_Lukas_Stoppa.jpg

Lukas Stoppa

Business Development
Solarius Europe

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To learn more about our products and solutions, please contact us or simply fill in your details below so a specialist can get in contact with you on short notice.

Branch Office Europe

Erpftinger Strasse 36
86899 Landsberg Am Lech
Deutschland

  • +49 151 422 045 30
  • sales@solarius.marposs.com
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Solarius Development Corp.
2360 Qume Drive
San Jose, CA 95131
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Nünningstraße 13
45141 Essen
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Solarius Trading (Shanghai) Ltd.
Unit C102, Block
Li Fung Plaza
2000 Yishan Road
201103 Shanghai
Peoples Republic of China

Solarius GmbH — Registered office: Erpftinger Straße 36 — 86899 Landsberg am Lech — Germany
Managing Director: Dipl. Ing. Gianluca Elmo — Registration and court number: München, HRB 231612

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